Faktor Koreksi Pada Gas Flowmeter
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| Krohne Mass Flow Meter |
Tabel berikut mencantumkan faktor koreksi gas teoritis untuk berbagai gas sehubungan dengan Nitrogen untuk pengendali aliran massa berbasis termal. Harap dicatat bahwa ketidak-linearan yang mungkin ada di antara kalibrasi Nitrogen dan aliran yang sebenarnya dari proses pada gas.
| Gas | Symbol | Specific Heat, CP cal/g°C | Density g/l @ 0°C | Conversion Factor |
| Air | - - - | 0.240 | 1.293 | 1.00 |
| Ammonia | NH3 | 0.492 | 0.760 | 0.73 |
| Argon | Ar | 0.1244 | 1.782 | 1.39 |
| Arsine | AsH3 | 0.1167 | 3.478 | 0.67 |
| Boron Trichloride | BCl3 | 0.1279 | 5.227 | 0.41 |
| Bromine | Br2 | 0.0539 | 7.130 | 0.81 |
| Carbon Dioxide | CO2 | 0.2016 | 1.964 | 0.70* |
| Carbon Monoxide | CO | 0.2488 | 1.250 | 1.00 |
| Carbon Tetrachloride | CCl4 | 0.1655 | 6.86 | 0.31 |
| Carbon Tetraflouride (Freon - 14) | CF4 | 0.1654 | 3.926 | 0.42 |
| Chlorine | Cl2 | 0.1144 | 3.163 | 0.86 |
| Chlorodifluoromethane (Freon - 22) | CHClF2 | 0.1544 | 3.858 | 0.46 |
| Chloropentafluoroethane (Freon - 115) | C2ClF5 | 0.164 | 6.892 | 0.24 |
| Chlorotrifluoromethane (Freon - 13) | CClF3 | 0.153 | 4.660 | 0.38 |
| Cyanogen | C2N2 | 0.2613 | 2.322 | 0.61 |
| Deuterium | D2 | 1.722 | 0.1799 | 1.00 |
| Diborane | B2H6 | 0.508 | 1.235 | 0.44 |
| Dibromodifluoromethane | CBr2F2 | 0.15 | 9.362 | 0.19 |
| Dichlorodifluoromethane (Freon - 12) | CCl2F2 | 0.1432 | 5.395 | 0.35 |
| Dichlorofluoromethane (Freon - 21) | CHCl2F | 0.140 | 4.592 | 0.42 |
| Dichloromethysilane | (CH3)2SiCl2 | 0.1882 | 5.758 | 0.25 |
| Dichlorosilane | SiH2Cl2 | 0.150 | 4.506 | 0.40 |
| 1,2-Dichlorotetrafluoroethane (Freon - 114) | C2Cl2F4 | 0.160 | 7.626 | 0.22 |
| 1,1-Difluoroethylene (Freon - 1132A) | C2H2F2 | 0.224 | 2.857 | 0.43 |
| 2,2-Dimethylpropane | C5H12 | 0.3914 | 3.219 | 0.22 |
| Ethane | C2H6 | 0.4097 | 1.342 | 0.50 |
| Fluorine | F2 | 0.1873 | 1.695 | 0.98 |
| Fluoroform (Freon - 23) | CHF3 | 0.176 | 3.127 | 0.50 |
| Freon - 11 | CCl3F | 0.1357 | 6.129 | 0.33 |
| Freon - 12 | CCl2F2 | 0.1432 | 5.395 | 0.35 |
| Freon - 13 | CClF3 | 0.153 | 4.660 | 0.38 |
| Freon - 13 B1 | CBrF3 | 0.1113 | 6.644 | 0.37 |
| Freon - 14 | CF4 | 0.1654 | 3.926 | 0.42 |
| Freon - 21 | CHCl2F | 0.140 | 4.592 | 0.42 |
| Freon - 22 | CHClF2 | 0.1544 | 3.858 | 0.46 |
| Freon - 23 | CHF3 | 0.176 | 3.127 | 0.50 |
| Freon - 113 | C2Cl2F3 | 0.161 | 8.360 | 0.20 |
| Freon - 114 | C2Cl2F4 | 0.160 | 7.626 | 0.22 |
| Freon - 115 | C2ClF5 | 0.164 | 6.892 | 0.24 |
| Freon - 116 | C2F6 | 0.1843 | 6.157 | 0.24 |
| Freon - C318 | C4F8 | 0.1866 | 8.93 | 0.164 |
| Freon - 1132A | C2H2F2 | 0.224 | 2.857 | 0.43 |
| Helium | He | 1.241 | 0.1786 | 1.45 |
| Hexafluoroethane (Freon - 116) | C2F6 | 0.1843 | 6.157 | 0.24 |
| Hydrogen | H2 | 3.419 | 0.0899 | 1.01 |
| Hydrogen Bromide | HBr | 0.0861 | 3.610 | 1.00 |
| Hydrogen Chloride | HCl | 0.1912 | 1.627 | 1.00 |
| Hydrogen Fluoride | HF | 0.3479 | 0.893 | 1.00 |
| Isobutylene | C4H8 | 0.3701 | 2.503 | 0.29 |
| Krypton | Kr | 0.0593 | 3.739 | 1.543 |
| Methane | CH4 | 0.5328 | 0.715 | 0.72 |
| Methyl Fluoride | CH3F | 0.3221 | 1.518 | 0.56 |
| Molybdenum Hexafluoride | MoF6 | 0.1373 | 9.366 | 0.21 |
| Neon | Ne | 0.246 | 0.900 | 1.46 |
| Nitric Oxide | NO | 0.2328 | 1.339 | 0.99 |
| Nitrogen | N2 | 0.2485 | 1.250 | 1.00 |
| Nitrogen Dioxide | NO2 | 0.1933 | 2.052 | ** |
| Nitrogen Trifluoride | NF3 | 0.1797 | 3.168 | 0.48 |
| Nitrous Oxide | N2O | 0.2088 | 1.964 | 0.71 |
| Octafluorocyclobutane (Freon - C318) | C4F8 | 0.1866 | 8.93 | 0.164 |
| Oxygen | O2 | 0.2193 | 1.427 | 0.993 |
| Pentane | C5H12 | 0.398 | 3.219 | 0.21 |
| Perfluoropropane | C3F8 | 0.194 | 8.388 | 0.17 |
| Phosgene | COCl2 | 0.1394 | 4.418 | 0.44 |
| Phosphine | PH3 | 0.2374 | 1.517 | 0.76 |
| Propane | C3H8 | 0.3885 | 1.967 | 0.36 |
| Propylene | C3H6 | 0.3541 | 1.877 | 0.41 |
| Silane | SiH4 | 0.3189 | 1.433 | 0.60 |
| Silicon Tetrachloride | SiCl4 | 0.1270 | 7.580 | 0.28 |
| Silicon Tetrafluoride | SiF4 | 0.1691 | 4.643 | 0.35 |
| Sulfur Dioxide | SO2 | 0.1488 | 2.858 | 0.69 |
| Sulfur Hexafluoride | SF6 | 0.1592 | 6.516 | 0.26 |
| Trichlorofluoromethane (Freon - 11) | CCl3F | 0.1357 | 6.129 | 0.33 |
| Trichlorosilane | SiHCl3 | 0.1380 | 6.043 | 0.33 |
| 1,1,2-Trichloro - 1,2,2-Trifluoroethane (Freon - 113) | CCl2FCClF2 or C2Cl3F3 | 0.161 | 8.360 | 0.20 |
| Tungsten Hexafluoride | WF6 | 0.0810 | 13.28 | 0.25 |
| Xenon | Xe | 0.0378 | 5.858 | 1.32 |
| Note: Standard pressure is defined as 760 mmHg (14.7 psia). Standard temperature is defined as 0°C. | ||||