Faktor Koreksi Pada Gas Flowmeter

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Krohne Mass Flow Meter
Tulisan ini sebenarnya saya sadur dari artikel asli berbahasa inggris yang berjudul "GAS CORRECTION FACTORS FOR THERMAL-BASED MASS FLOW CONTROLLERS", jika ingin melihat versi bahasa aslinya silahkan mengunjungi website http://www.mksinst.com/docs/UR/MFCGasCorrection.aspx

Tabel berikut mencantumkan faktor koreksi gas teoritis untuk berbagai gas sehubungan dengan Nitrogen untuk pengendali aliran massa berbasis termal. Harap dicatat bahwa ketidak-linearan yang mungkin ada di antara kalibrasi Nitrogen dan aliran yang sebenarnya dari proses pada gas.


GasSymbolSpecific Heat, CP
cal/g°C		Density
g/l @ 0°C		Conversion
Factor
Air- - -0.2401.2931.00
AmmoniaNH30.4920.7600.73
ArgonAr0.12441.7821.39
ArsineAsH30.11673.4780.67
Boron TrichlorideBCl30.12795.2270.41
BromineBr20.05397.1300.81
Carbon DioxideCO20.20161.9640.70*
Carbon MonoxideCO0.24881.2501.00
Carbon TetrachlorideCCl40.16556.860.31
Carbon Tetraflouride
   (Freon - 14)		CF40.16543.9260.42
ChlorineCl20.11443.1630.86
Chlorodifluoromethane
   (Freon - 22)		CHClF20.15443.8580.46
Chloropentafluoroethane
   (Freon - 115)		C2ClF50.1646.8920.24
Chlorotrifluoromethane
   (Freon - 13)		CClF30.1534.6600.38
CyanogenC2N20.26132.3220.61
DeuteriumD21.7220.17991.00
DiboraneB2H60.5081.2350.44
DibromodifluoromethaneCBr2F20.159.3620.19
Dichlorodifluoromethane
   (Freon - 12)		CCl2F20.14325.3950.35
Dichlorofluoromethane
   (Freon - 21)		CHCl2F0.1404.5920.42
Dichloromethysilane(CH3)2SiCl20.18825.7580.25
DichlorosilaneSiH2Cl20.1504.5060.40
1,2-Dichlorotetrafluoroethane
   (Freon - 114)		C2Cl2F40.1607.6260.22
1,1-Difluoroethylene
   (Freon - 1132A)		C2H2F20.2242.8570.43
2,2-DimethylpropaneC5H120.39143.2190.22
EthaneC2H60.40971.3420.50
FluorineF20.18731.6950.98
Fluoroform
   (Freon - 23)		CHF30.1763.1270.50
Freon - 11CCl3F0.13576.1290.33
Freon - 12CCl2F20.14325.3950.35
Freon - 13CClF30.1534.6600.38
Freon - 13 B1CBrF30.11136.6440.37
Freon - 14CF40.16543.9260.42
Freon - 21CHCl2F0.1404.5920.42
Freon - 22CHClF20.15443.8580.46
Freon - 23CHF30.1763.1270.50
Freon - 113C2Cl2F30.1618.3600.20
Freon - 114C2Cl2F40.1607.6260.22
Freon - 115C2ClF50.1646.8920.24
Freon - 116C2F60.18436.1570.24
Freon - C318C4F80.18668.930.164
Freon - 1132AC2H2F20.2242.8570.43
HeliumHe1.2410.17861.45
Hexafluoroethane
   (Freon - 116)		C2F60.18436.1570.24
HydrogenH23.4190.08991.01
Hydrogen BromideHBr0.08613.6101.00
Hydrogen ChlorideHCl0.19121.6271.00
Hydrogen FluorideHF0.34790.8931.00
IsobutyleneC4H80.37012.5030.29
KryptonKr0.05933.7391.543
MethaneCH40.53280.7150.72
Methyl FluorideCH3F0.32211.5180.56
Molybdenum HexafluorideMoF60.13739.3660.21
NeonNe0.2460.9001.46
Nitric OxideNO0.23281.3390.99
NitrogenN20.24851.2501.00
Nitrogen DioxideNO20.19332.052**
Nitrogen TrifluorideNF30.17973.1680.48
Nitrous OxideN2O0.20881.9640.71
Octafluorocyclobutane
   (Freon - C318)		C4F80.18668.930.164
OxygenO20.21931.4270.993
PentaneC5H120.3983.2190.21
PerfluoropropaneC3F80.1948.3880.17
PhosgeneCOCl20.13944.4180.44
PhosphinePH30.23741.5170.76
PropaneC3H80.38851.9670.36
PropyleneC3H60.35411.8770.41
SilaneSiH40.31891.4330.60
Silicon TetrachlorideSiCl40.12707.5800.28
Silicon TetrafluorideSiF40.16914.6430.35
Sulfur DioxideSO20.14882.8580.69
Sulfur HexafluorideSF60.15926.5160.26
Trichlorofluoromethane
   (Freon - 11)		CCl3F0.13576.1290.33
TrichlorosilaneSiHCl30.13806.0430.33
1,1,2-Trichloro -
1,2,2-Trifluoroethane
   (Freon - 113)		CCl2FCClF2
or  C2Cl3F3		0.1618.3600.20
Tungsten HexafluorideWF60.081013.280.25
XenonXe0.03785.8581.32
Note: Standard pressure is defined as 760 mmHg (14.7 psia). Standard temperature is defined as 0°C.


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